Rapid Thermal Annealing (RTA) System for Boulder Micro-Fabrication Facility

The National Institute of Standards and Technology (NIST) in Boulder, Colorado, requires a Rapid Thermal Annealing (RTA) system for its Boulder Micro-Fabrication Facility (BMF). The current system can anneal substrates up to 100 mm, but the BMF needs a new system capable of annealing substrates up to 150 mm. This new system must be similar to the existing one but include additional features such as a vacuum chamber and the ability to directly measure substrate temperature in-situ using an optical pyrometer. The system must also fit within the allocated space of 1 m x 1 m x 2 m. NIST intends to award a sole-source contract to Annealsys for this RTA system, as market research indicated that Annealsys is the only manufacturer capable of meeting all minimum requirements, including specific optical pyrometer specifications and space constraints that other manufacturers could not satisfy. This acquisition is being conducted under the authority of FAR 12.102(a) and falls under NAICS code 334516, Analytical Laboratory Instrument Manufacturing.